Details

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Flow rate Nm3/min	Grade PF 25μm	Grade AO 1μm,1ppm	Grade AA 0.01μm,0.01ppm	Grade AX 0.01μm,0.001ppm	Grade ACS 0.01μm,0.001ppm
0.53	K009PF	K009AO	K009AA	K009AX	K009ACS
1	K017PF	K017AO	K017AA	K017AX	K017ACS
1.8	K030PF	K030AO	K030AA	K030AX	K030ACS
3.6	K058PF	K058AO	K058AA	K058AX	K058ACS
8.7	K145PF	K145AO	K145AA	K145AX	K145ACS
13.2	K220PF	K220AO	K220AA	K220AX	K220ACS
19.8	K330PF	K330AO	K330AA	K330AX	K330ACS
25.8	K430PF	K430AO	K430AA	K430AX	K430ACS
37	K620PF	K620AO	K620AA	K620AX	K620ACS